Investigation of the elastic modulus of thin films using simple biaxial bending techniques

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 304-309

  Jamting A K ^a   Bell, J M ^a   Swain, M V ^b   Schwarzer, N ^c  

^a QUEENSLAND UNIVERSITY OF TECHNOLOGY   (Australia)

^b CSIRO   (Australia)

^c CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Biaxial bending; Elastic modulus; Magnetron sputtering; Thin films

Indexed keywords

BENDING (FORMING); ELASTIC MODULI; HARDNESS; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; SUBSTRATES;

BIAXIAL BENDING TECHNIQUES;

THIN FILMS;

EID: 0031247649     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00559-2     Document Type: Article

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