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Volumn 39, Issue 1, 2006, Pages 73-93

A spatio-temporal study of variable composition laser-produced Sn plasmas

Author keywords

[No Author keywords available]

Indexed keywords

BINARY MIXTURES; ELECTRIC CHARGE; EXCIMER LASERS; LITHOGRAPHY; MATHEMATICAL MODELS; OPTIMIZATION;

EID: 29144488450     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/1/013     Document Type: Article
Times cited : (22)

References (80)
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    • 29144510592 scopus 로고    scopus 로고
    • Atomic physics of highly charged ions and the case for Sn as a source material
    • O'Sullivan G et al 2005 Atomic physics of highly charged ions and the case for Sn as a source material EUV Sources for Lithography ed V Bakshi (Bellingham WA: SPIE) at press
    • (2005) EUV Sources for Lithography
    • O'Sullivan, G.1
  • 8
    • 24644441679 scopus 로고    scopus 로고
    • Hayden P et al 2005 Proc. SPIE Emerging lithographic technologies IX 5751 919-26
    • (2005) Proc. SPIE , vol.5751 , pp. 919-926
    • Hayden, P.1    Al, E.2
  • 44
    • 0027804449 scopus 로고
    • Cerjan C 1993 Appl. Opt. 32 6911-13
    • (1993) Appl. Opt. , vol.32 , Issue.34 , pp. 6911-6913
    • Cerjan, C.1
  • 52
    • 29144501632 scopus 로고    scopus 로고
    • Djaoui A 1996 A user guide for the laser-plasma simulation code: MED103 RAL-TR-96-099
    • (1996)
    • Djaoui, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.