Conversion efficiency of a laser-produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody

Journal of Physics D: Applied Physics

Volumn 38, Issue 4, 2005, Pages 604-616

  Cummings, A ^a   O'Sullivan, G ^a   Dunne, P ^a   Sokell, E ^a   Murphy, N ^a   White, J ^a  

^a UNIVERSITY COLLEGE DUBLIN   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

HYDRODYNAMICS; INTEGRATION; LASER PULSES; LITHOGRAPHY; MATHEMATICAL MODELS; Q SWITCHED LASERS; TIN;

CONVERSION EFFICIENCIES (CE); EXTREME ULTRAVIOLET LITHOGRAPHIC (EUVL); FIGURE OF MERIT (FOM); HYDRODYNAMIC MODEL;

LASER PRODUCED PLASMAS;

EID: 14544278104     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/38/4/013     Document Type: Article

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