-
1
-
-
0001421260
-
Tunable narrowband soft x-ray source for projection lithography
-
G. O'Sullivan and R. Faulkner, "Tunable narrowband soft x-ray source for projection lithography," Optical Engineering 33(12), pp. 3978-3983, 1994.
-
(1994)
Optical Engineering
, vol.33
, Issue.12
, pp. 3978-3983
-
-
O'Sullivan, G.1
Faulkner, R.2
-
2
-
-
27644459261
-
-
Chapter 2, Submitted, SPIE, Bellingham, WA, USA
-
G. O'Sullivan, A. Cummings, P. Hayden, L. McKinney, N. Murphy, and J. White, EUVL sources for EUVL lithography, chapter 2, submitted, SPIE, Bellingham, WA, USA, 2005.
-
(2005)
EUVL Sources for EUVL Lithography
-
-
O'Sullivan, G.1
Cummings, A.2
Hayden, P.3
McKinney, L.4
Murphy, N.5
White, J.6
-
3
-
-
0042010095
-
Emissive properties of xenon ions from a laser produced plasma in the 100-140 Å spectral range: Atmomic physics analysis of the experimental data
-
F. Gilleron, M. Poirier, T. Blenski, M. Schmidt, and T. Ceccotti, "Emissive properties of xenon ions from a laser produced plasma in the 100-140 Å spectral range: Atmomic physics analysis of the experimental data," J. Appl. Phys. 94(3), pp. 2086-2096, 2003.
-
(2003)
J. Appl. Phys.
, vol.94
, Issue.3
, pp. 2086-2096
-
-
Gilleron, F.1
Poirier, M.2
Blenski, T.3
Schmidt, M.4
Ceccotti, T.5
-
4
-
-
0019016495
-
Laser-produced continua for absorption spectroscopy in the VUV and XUV
-
P. K. Carroll, E. T. Kennedy, and G. O'Sullivan, "Laser-produced continua for absorption spectroscopy in the VUV and XUV," Appl. Opt. 19(9), pp. 1454-1462, 1980.
-
(1980)
Appl. Opt.
, vol.19
, Issue.9
, pp. 1454-1462
-
-
Carroll, P.K.1
Kennedy, E.T.2
O'Sullivan, G.3
-
6
-
-
3643075349
-
Soft-x-ray projection lithography system design
-
N. M. Ceglio and A. M. Hawryluk, "Soft-x-ray projection lithography system design," in Soft-X-Ray Projection Lithography, OSA Technical Digest Series (Optical Society of America, Washington D. C. 12, pp. 5-10, 1991.
-
(1991)
Soft-X-ray Projection Lithography, OSA Technical Digest Series (Optical Society of America, Washington D. C.)
, vol.12
, pp. 5-10
-
-
Ceglio, N.M.1
Hawryluk, A.M.2
-
7
-
-
84953675274
-
Fabrication of high - Reflectance Mo - Si multilayer mirrors by planar - Magnetron splitting
-
D. G. Stearns, R. S. Rosen, and S. P. Vernon, "Fabrication of high - reflectance Mo - Si multilayer mirrors by planar - magnetron splitting," J. Vac. Sci. Technol. A9, pp. 2662-2669, 1991.
-
(1991)
J. Vac. Sci. Technol.
, vol.A9
, pp. 2662-2669
-
-
Stearns, D.G.1
Rosen, R.S.2
Vernon, S.P.3
-
8
-
-
0000413753
-
Interpretation of the quasicontinuum band emitted by highly ionized rare-earth elements in the 70-100 Å range
-
P. Mandelbaum, M. Finkenthal, J. L. Schwob, and M. Klapisch, "Interpretation of the quasicontinuum band emitted by highly ionized rare-earth elements in the 70-100 Å range," Phys. Rev. A 35(12), pp. 5051-5059, 1987.
-
(1987)
Phys. Rev. A
, vol.35
, Issue.12
, pp. 5051-5059
-
-
Mandelbaum, P.1
Finkenthal, M.2
Schwob, J.L.3
Klapisch, M.4
-
9
-
-
4243142639
-
Photoionization of the 4d electrons in xenon
-
D. L. Ederer, "Photoionization of the 4d electrons in xenon," Phys. Rev. Lett. 13(25), pp. 760, 1964.
-
(1964)
Phys. Rev. Lett.
, vol.13
, Issue.25
, pp. 760
-
-
Ederer, D.L.1
-
10
-
-
0035962946
-
2+ ions
-
2+ ions," J. Phys. B: At. Mol. Opt. Phys. 34, pp. 2009-2019, 2001.
-
(2001)
J. Phys. B: At. Mol. Opt. Phys.
, vol.34
, pp. 2009-2019
-
-
Andersen, P.1
Andersen, T.2
Folkmann, F.3
Ivanov, V.K.4
Kjeldsen, H.5
West, J.B.6
-
11
-
-
1842587588
-
VUV/EUV ionising radiation and atoms and ions: Dual laser plasma investigations
-
E. T. Kennedy, J. T. Costello, J. P. Mosnier, and P. van Kampen, "VUV/EUV ionising radiation and atoms and ions: Dual laser plasma investigations," Rad. Phys. Chem. 70, pp. 291-, 2004.
-
(2004)
Rad. Phys. Chem.
, vol.70
, pp. 291
-
-
Kennedy, E.T.1
Costello, J.T.2
Mosnier, J.P.3
Van Kampen, P.4
-
12
-
-
0015658534
-
X-ray emission in laser-produced plasmas
-
D. Colombant and G. F. Tonon, "X-ray emission in laser-produced plasmas," J. Appl. Phys. 44(8), pp. 3524-3537, 1973.
-
(1973)
J. Appl. Phys.
, vol.44
, Issue.8
, pp. 3524-3537
-
-
Colombant, D.1
Tonon, G.F.2
-
13
-
-
0038998694
-
On the outermost d-subshell absorption spectra of Ge I and Sn I
-
J. P. Connerade and M. A. P. Martin, "On the outermost d-subshell absorption spectra of Ge I and Sn I," Proc. R. Soc. Lond. A. 357, pp. 103-115, 1977.
-
(1977)
Proc. R. Soc. Lond. A.
, vol.357
, pp. 103-115
-
-
Connerade, J.P.1
Martin, M.A.P.2
-
14
-
-
0035859752
-
4d → 5p transitions in the extreme ultraviolet photoabsorption spectra of Sn II and Sn III
-
G. Duffy, P. van Kampen, and P. Dunne, "4d → 5p transitions in the extreme ultraviolet photoabsorption spectra of Sn II and Sn III," J. Phys. B: At. Mol. Opt. Phys. 34, pp. 3171-3178, 2001.
-
(2001)
J. Phys. B: At. Mol. Opt. Phys.
, vol.34
, pp. 3171-3178
-
-
Duffy, G.1
Van Kampen, P.2
Dunne, P.3
-
15
-
-
0343526954
-
4d photoabsorption in Sn III
-
P. Dunne, F. O'Reilly, G. O'Sullivan, and N. Murphy, "4d photoabsorption in Sn III," J. Phys. B: At. Mol. Opt. Phys. 32, pp. L597-L602, 1999.
-
(1999)
J. Phys. B: At. Mol. Opt. Phys.
, vol.32
-
-
Dunne, P.1
O'Reilly, F.2
O'Sullivan, G.3
Murphy, N.4
-
17
-
-
3943102231
-
Interaction of maxima in the absorption of soft x-rays
-
J. W. Cooper, "Interaction of maxima in the absorption of soft x-rays," Phys. Rev. Lett. 13, pp. 762-764, 1964.
-
(1964)
Phys. Rev. Lett.
, vol.13
, pp. 762-764
-
-
Cooper, J.W.1
-
18
-
-
0021411556
-
A relativistic program for optical response in atoms using a time-dependent local density approximation
-
D. A. Libermani and A. Zangwill, "A relativistic program for optical response in atoms using a time-dependent local density approximation," Computer Physics Communications 32, pp. 75-82, 1984.
-
(1984)
Computer Physics Communications
, vol.32
, pp. 75-82
-
-
Libermani, D.A.1
Zangwill, A.2
-
19
-
-
0001045455
-
2+
-
2+," Phys. Rev. A 53, pp. 3211-3226, 1996.
-
(1996)
Phys. Rev. A
, vol.53
, pp. 3211-3226
-
-
O'Sullivan, G.1
McGuinness, C.2
Costello, J.T.3
Kennedy, E.T.4
Weinmann, B.5
-
20
-
-
0035250975
-
4+
-
4+," Phys. Rev. A 63, p. 022702, 2001.
-
(2001)
Phys. Rev. A
, vol.63
, pp. 022702
-
-
Cummings, A.1
McGuinness, C.2
Sullivan, G.O.3
Costello, J.T.4
Mosnier, J.P.5
Kennedy, E.T.6
-
22
-
-
0000130326
-
The evolution of the 4d photoabsorption in Sb with increasing ionization
-
R. D'Arcy, J. T. Costello, E. T. Kennedy, C. McGuinness, J. P. Mosnier, and G. O'Sullivan, "The evolution of the 4d photoabsorption in Sb with increasing ionization," J. Phys. B: At. Mol. Opt. Phys. 33, pp. 1383-1401, 2000.
-
(2000)
J. Phys. B: At. Mol. Opt. Phys.
, vol.33
, pp. 1383-1401
-
-
D'Arcy, R.1
Costello, J.T.2
Kennedy, E.T.3
McGuinness, C.4
Mosnier, J.P.5
O'Sullivan, G.6
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