Ultimate efficiency of extreme ultraviolet radiation from a laser-produced plasma

Physical Review Letters

Volumn 94, Issue 1, 2005, Pages

  Aota, Tatsuya ^a   Tomie, Toshihisa ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EXTREME ULTRAVIOLET RADIATIONS; PLASMA EXPANSION; RADIATION EFFICIENCY; TIN OXIDE;

CARRIER CONCENTRATION; ENERGY CONVERSION; FUNCTIONS; LASER BEAM EFFECTS; LITHOGRAPHY; MATHEMATICAL MODELS; PHOTONS; PLASMA DENSITY; PUMPING (LASER); TIN COMPOUNDS; ULTRAVIOLET RADIATION;

LASER PRODUCED PLASMAS;

EID: 18144431400     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.94.015004     Document Type: Article

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