EUV spectroscopy of mass-limited Sn-doped laser microplasmas

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5751, Issue II, 2005, Pages 779-788

  George, Simi ^a   Koay, Chiew Seng ^a   Takenoshita, Kazutoshi ^a   Bernath, Robert ^a   Al Rabban, Moza ^b   Keyser, Christian ^c   Bakshi, Vivek ^d   Scott, Howard ^e   Richardson, Martin ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b QATAR UNIVERSITY   (Qatar)

^c Naval Research Laboratories   (United States)

^d SEMATECH   (United States)

^e LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

EUV; Laser plasmas; Sources; Tin plasmas; Xe sources

Indexed keywords

LASER-PLASMAS; SOURCES; TIN PLASMAS; XE SOURCES;

HYDRODYNAMICS; LASER PRODUCED PLASMAS; LIGHT EMISSION; LITHOGRAPHY; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER; TIN;

ULTRAVIOLET SPECTROSCOPY;

EID: 24644446384     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.596781     Document Type: Conference Paper

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