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Volumn 5751, Issue II, 2005, Pages 919-926
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13.5 nm emission from composite targets containing tin
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Author keywords
EUV source; Laser plasma; Tin; Unresolved transition array
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Indexed keywords
LASER PRODUCED PLASMAS;
RADIATION EFFECTS;
SPECTROGRAPHS;
TARGETS;
TIN;
ULTRAVIOLET RADIATION;
EUV SOURCES;
LASER PLASMA;
SPECTRAL REGION;
UNRESOLVED TRANSITION ARRAY;
LIGHT EMISSION;
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EID: 24644441679
PISSN: 16057422
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.601740 Document Type: Conference Paper |
Times cited : (15)
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References (11)
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