Detailed space-resolved characterization of a laser-plasma soft-x-ray source at 13.5-nm wavelength with tin and its oxides

Journal of the Optical Society of America B: Optical Physics

Volumn 17, Issue 9, 2000, Pages 1616-1625

  Choi, Il Woo ^a,d   Daido, Hiroyuki ^a,e   Yamagami, Susumu ^a   Nagai, Keiji ^a   Norimatsu, Takayoshi ^a   Takabe, Hideaki ^a   Suzuki, Masaynki ^b   Nakayama, Takeyoshi ^b   Matsui, Tetsuya ^c  

^a OSAKA UNIVERSITY   (Japan)

^b KINKI UNIVERSITY   (Japan)

^c HITACHI LTD   (Japan)

^d Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^e JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CRYOGENICS; DATABASE SYSTEMS; LITHOGRAPHY; SPECTROSCOPIC ANALYSIS; TIN COMPOUNDS;

WAVELENGTH SHIFT;

LASER PRODUCED PLASMAS;

EID: 0034413652     PISSN: 07403224     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAB.17.001616     Document Type: Article

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