-
1
-
-
10644227029
-
EUV sources using Xe and Sn discharge plasmas
-
V. M. Borisov, A. V. Eltsov, A. S. Ivanov, Y. B. Kiryukhin, O. B. Khristoforov, V. A. Mishchenko, A. V. Prokofiev, A. Y. Vinokhodov, and V. A. Vodchits, "EUV sources using Xe and Sn discharge plasmas," J. Phys. D: Appl. Phys. 37, pp. 3254-3265, 2004.
-
(2004)
J. Phys. D: Appl. Phys.
, vol.37
, pp. 3254-3265
-
-
Borisov, V.M.1
Eltsov, A.V.2
Ivanov, A.S.3
Kiryukhin, Y.B.4
Khristoforov, O.B.5
Mishchenko, V.A.6
Prokofiev, A.V.7
Vinokhodov, A.Y.8
Vodchits, V.A.9
-
3
-
-
0036378636
-
Xenon target performance characteristics for laser-produced plasma EUV sources
-
Emerging Lithographic Technologies VI, R. L. Engelstad, ed.
-
H. Shields, S. W. Fornaca, M. B. Petach, M. Michealian, R. D. McGregor, R. H. Moyer, and R. S. Pierre, "Xenon target performance characteristics for laser-produced plasma EUV sources," in Emerging Lithographic Technologies VI, R. L. Engelstad, ed., Proc. SPIE 4688, pp. 94-101, 2002.
-
(2002)
Proc. SPIE
, vol.4688
, pp. 94-101
-
-
Shields, H.1
Fornaca, S.W.2
Petach, M.B.3
Michealian, M.4
McGregor, R.D.5
Moyer, R.H.6
Pierre, R.S.7
-
4
-
-
10644277296
-
Liquid-jet laser-plasma extreme ultraviolet sources: From droplets to filaments
-
B. A. M. Hansson and H. M. Hertz, "Liquid-jet laser-plasma extreme ultraviolet sources: from droplets to filaments," J. Phys. D: Appl. Phys. 37, pp. 3233-3243, 2004.
-
(2004)
J. Phys. D: Appl. Phys.
, vol.37
, pp. 3233-3243
-
-
Hansson, B.A.M.1
Hertz, H.M.2
-
5
-
-
0001421260
-
Tunable narrowband soft x-ray source for projection lithography
-
G. O'Sullivan and R. Faulkner, "Tunable narrowband soft x-ray source for projection lithography," Optical Engineering 33(12), pp. 3978-3983, 1994.
-
(1994)
Optical Engineering
, vol.33
, Issue.12
, pp. 3978-3983
-
-
O'Sullivan, G.1
Faulkner, R.2
-
6
-
-
27644464131
-
Unresolved transition arrays
-
J. Bauche, C. Bauche-Arnoult, and M. Klapisch, "Unresolved transition arrays," Physica Scripta 37, pp. 659-663, 1988.
-
(1988)
Physica Scripta
, vol.37
, pp. 659-663
-
-
Bauche, J.1
Bauche-Arnoult, C.2
Klapisch, M.3
-
7
-
-
10644271906
-
UTA versus line emission for EUVL: Studies on Xenon emission at the NIST EBIT
-
2007
-
K. Fahy, P. Dunne, L. McKinney, G. O'Sullivan, E. Sokell, J. White, A. Aguilar, J. M. Pomeroy, J. N. Tan, B. Blagojević, E. O. LeBigot, and J. D. Gillaspy, "UTA versus line emission for EUVL: Studies on Xenon emission at the NIST EBIT," J. Phys. D; Appl. Phys. 37, pp. 3225-3232, 2007.
-
J. Phys. D; Appl. Phys.
, vol.37
, pp. 3225-3232
-
-
Fahy, K.1
Dunne, P.2
McKinney, L.3
O'Sullivan, G.4
Sokell, E.5
White, J.6
Aguilar, A.7
Pomeroy, J.M.8
Tan, J.N.9
Blagojević, B.10
Lebigot, E.O.11
Gillaspy, J.D.12
-
8
-
-
13844296711
-
Simulation of the EUV spectrum of Xe and Sn plasmas
-
A. Sasaki, K. Nishihara, F. Koike, T. Kagawa, T. Nishikawa, K. Fujima, T. Kawamura, and H. Furukawa, "Simulation of the EUV spectrum of Xe and Sn plasmas," IEEE Journal of Selected Topics in Quantum Electronics 10(6), pp. 1307-1314, 2004.
-
(2004)
IEEE Journal of Selected Topics in Quantum Electronics
, vol.10
, Issue.6
, pp. 1307-1314
-
-
Sasaki, A.1
Nishihara, K.2
Koike, F.3
Kagawa, T.4
Nishikawa, T.5
Fujima, K.6
Kawamura, T.7
Furukawa, H.8
-
10
-
-
14544278104
-
Conversion efficiency of a laser produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody
-
A. Cummings, G. O'Sullivan, P. Dunne, E. Sokell, N. Murphy, and J. White, "Conversion efficiency of a laser produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody," J. Phys. D: Appl. Phys. 38, pp. 604-616, 2005.
-
(2005)
J. Phys. D: Appl. Phys.
, vol.38
, pp. 604-616
-
-
Cummings, A.1
O'Sullivan, G.2
Dunne, P.3
Sokell, E.4
Murphy, N.5
White, J.6
-
11
-
-
18144431400
-
Ultimate efficiency of extreme ultraviolet radiation from a laser-produced plasma
-
T. Aota and T. Tomie, "Ultimate efficiency of extreme ultraviolet radiation from a laser-produced plasma," Physical Review Letters 94(1), p. 015004, 2005.
-
(2005)
Physical Review Letters
, vol.94
, Issue.1
, pp. 015004
-
-
Aota, T.1
Tomie, T.2
-
12
-
-
0036419907
-
Debris from tape-target irradiated with pulsed YAG laser
-
H. Azuma, Y. Nishimura, A. Sakata, and A. Takeuchi, "Debris from tape-target irradiated with pulsed YAG laser," Applied Surface Science 197-198, pp. 224-228, 2002.
-
(2002)
Applied Surface Science
, vol.197-198
, pp. 224-228
-
-
Azuma, H.1
Nishimura, Y.2
Sakata, A.3
Takeuchi, A.4
-
13
-
-
1942518270
-
High efficiency tin-based EUV sources
-
Laser-Generated and Other Lab. X-Ray and EUV Sources, Optics, Apps., G. A. Kyrala, J.-C. J. Gauthier, C. A. MacDonald, and A. M. Khounsary, eds.
-
M. Richardson, C.-S. Koay, C.Keyser, K. Takenoshita, E. Fujiwara, and M. Al-Rabban, "High efficiency tin-based EUV sources," in Laser-Generated and Other Lab. X-Ray and EUV Sources, Optics, Apps., G. A. Kyrala, J.-C. J. Gauthier, C. A. MacDonald, and A. M. Khounsary, eds., Proc. SPIE 5196, pp. 119-127, 2004.
-
(2004)
Proc. SPIE
, vol.5196
, pp. 119-127
-
-
Richardson, M.1
Koay, C.-S.2
Keyser, C.3
Takenoshita, K.4
Fujiwara, E.5
Al-Rabban, M.6
-
14
-
-
2142714542
-
Liquid-tin-jet laser-plasma extreme ultraviolet generation
-
P. A. C. Jansson, B. A. M. Hansson, O. Hemberg, M. Otendal, A. Holmberg, J. de Groot, and H. M. Hertz, "Liquid-tin-jet laser-plasma extreme ultraviolet generation," Applied Physics Letters 84(13), pp. 2256-2258, 2004.
-
(2004)
Applied Physics Letters
, vol.84
, Issue.13
, pp. 2256-2258
-
-
Jansson, P.A.C.1
Hansson, B.A.M.2
Hemberg, O.3
Otendal, M.4
Holmberg, A.5
De Groot, J.6
Hertz, H.M.7
-
15
-
-
27644527172
-
Present status of extreme ultraviolet source development by laser produced plasma
-
th Symposium on Plasma Processing, pp. S1-3, 2004.
-
(2004)
th Symposium on Plasma Processing
-
-
Nishimura, H.1
Fujioka, S.2
Tao, Y.3
Yamaura, M.4
Shimada, Y.5
Uchida, S.6
Sunahara, A.7
Furukawa, H.8
Nagai, K.9
Norimatsu, T.10
Murakami, M.11
Nishihara, K.12
Miyanaga, N.13
Izawa, Y.14
-
16
-
-
20844446307
-
Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams
-
Y. Shimada, H. Nishimura, M. Nakai, K. Hashimoto, M. Yamaura, Y. Tao, K. Shigemori, T. Okuno, K. Nishihara, T. Kawamura, A. Sunahara, T. Nishikawa, A. Sasaki, K. Nagai, T. Norimatsu, S. Fujioka, S. Uchida, N. Miyanaga, Y. Izawa, and C. Yamanaka, "Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams," Applied Physics Letters 86, p. 051501, 2005.
-
(2005)
Applied Physics Letters
, vol.86
, pp. 051501
-
-
Shimada, Y.1
Nishimura, H.2
Nakai, M.3
Hashimoto, K.4
Yamaura, M.5
Tao, Y.6
Shigemori, K.7
Okuno, T.8
Nishihara, K.9
Kawamura, T.10
Sunahara, A.11
Nishikawa, T.12
Sasaki, A.13
Nagai, K.14
Norimatsu, T.15
Fujioka, S.16
Uchida, S.17
Miyanaga, N.18
Izawa, Y.19
Yamanaka, C.20
more..
-
17
-
-
0001851137
-
Prepulsed-enhanced narrow bandwidth soft x-ray emission from a low debris, subnanosecond, laser plasma source
-
P. Dunne, G. O'Sullivan, and D. O'Reilly, "Prepulsed-enhanced narrow bandwidth soft x-ray emission from a low debris, subnanosecond, laser plasma source," Appl. Phys. Lett. 76(1), pp. 34-36, 2000.
-
(2000)
Appl. Phys. Lett.
, vol.76
, Issue.1
, pp. 34-36
-
-
Dunne, P.1
O'Sullivan, G.2
O'Reilly, D.3
-
18
-
-
24644441679
-
13.5 nm Emission from composite targets containing tin
-
P. Hayden, A. Cummings, L. Gaynor, N. Murphy, G. O'Sullivan, P. Sheridan, E. Sokell, J. White, and P. Dunne, "13.5 nm emission from composite targets containing tin," in Emerging Lithographic Technologies IX, Proc. SPIE 5751-113, 2005.
-
(2005)
Emerging Lithographic Technologies IX, Proc. SPIE
, vol.5751
, Issue.113
-
-
Hayden, P.1
Cummings, A.2
Gaynor, L.3
Murphy, N.4
O'Sullivan, G.5
Sheridan, P.6
Sokell, E.7
White, J.8
Dunne, P.9
-
19
-
-
11144357595
-
Optimising an EUV source for 13.5 nm
-
Laser-Generated and Other Lab. X-Ray and EUV Sources, Optics, Apps., G. A. Kyrala, J.-C. J. Gauthier, C. A. MacDonald, and A. M. Khounsary, eds.
-
G. O'Sullivan, A. Cummings, G. Duffy, P. Dunne, A. Fitzpatrick, P. Hayden, L. McKinney, N. Murphy, D. O'Reilly, E. Sokell, and J. White, "Optimising an EUV source for 13.5 nm," in Laser-Generated and Other Lab. X-Ray and EUV Sources, Optics, Apps., G. A. Kyrala, J.-C. J. Gauthier, C. A. MacDonald, and A. M. Khounsary, eds., Proc. SPIE 5196, pp. 273-281, 2004.
-
(2004)
Proc. SPIE
, vol.5196
, pp. 273-281
-
-
O'Sullivan, G.1
Cummings, A.2
Duffy, G.3
Dunne, P.4
Fitzpatrick, A.5
Hayden, P.6
McKinney, L.7
Murphy, N.8
O'Reilly, D.9
Sokell, E.10
White, J.11
-
20
-
-
0019609861
-
Layered synthetic microsturctures as Bragg diffractors for x-rays and EUV: Theory and predicted performance
-
J. H. Underwood and T. W. Barbee, "Layered synthetic microsturctures as Bragg diffractors for x-rays and EUV: Theory and predicted performance," Applied Optics 20(17), pp. 3027-3034, 1981.
-
(1981)
Applied Optics
, vol.20
, Issue.17
, pp. 3027-3034
-
-
Underwood, J.H.1
Barbee, T.W.2
-
21
-
-
0015658534
-
X-ray emission in laser-produced plasmas
-
D. Colombant and G. F. Tonon, "X-ray emission in laser-produced plasmas," J. Appl. Phys. 44(8), pp. 3524-3537, 1973.
-
(1973)
J. Appl. Phys.
, vol.44
, Issue.8
, pp. 3524-3537
-
-
Colombant, D.1
Tonon, G.F.2
-
22
-
-
0009482698
-
Laser-produced plasmas
-
P. K. Carroll and E. T. Kennedy, "Laser-produced plasmas," Contemp. Phys. 22(1), pp. 61-96, 1981.
-
(1981)
Contemp. Phys.
, vol.22
, Issue.1
, pp. 61-96
-
-
Carroll, P.K.1
Kennedy, E.T.2
-
23
-
-
0032641767
-
Characterization of laser-ablation plasmas
-
S. Amoruso, R. Bruzzese, N. Spinelli, and R. Velotta, "Characterization of laser-ablation plasmas," J. Phys. B: At. Mol. Opt. Phys. 32(14), pp. R131-R172, 1999.
-
(1999)
J. Phys. B: At. Mol. Opt. Phys.
, vol.32
, Issue.14
-
-
Amoruso, S.1
Bruzzese, R.2
Spinelli, N.3
Velotta, R.4
-
24
-
-
4544310414
-
Variable commposition laser-produced Sn plasmas - A study of their time-independent ion distribution
-
A. Cummings, G. O'Sullivan, P. Dunne, E. Sokell, N. Murphy, J. White, K. Fahy, A. Fitzpatrick, L. Gaynor, P. Hayden, D. Kedzierski, D. Kilbane, M. Lysaght, L. McKinney, and P. Sheridan, "Variable commposition laser-produced Sn plasmas - a study of their time-independent ion distribution," J. Phys. D: Appl. Phys. 37, pp. 2376-2384, 2004.
-
(2004)
J. Phys. D: Appl. Phys.
, vol.37
, pp. 2376-2384
-
-
Cummings, A.1
O'Sullivan, G.2
Dunne, P.3
Sokell, E.4
Murphy, N.5
White, J.6
Fahy, K.7
Fitzpatrick, A.8
Gaynor, L.9
Hayden, P.10
Kedzierski, D.11
Kilbane, D.12
Lysaght, M.13
McKinney, L.14
Sheridan, P.15
-
25
-
-
0011878283
-
Soft x-ray emission from laser plasma of cryogenic mixture targets
-
A. Shimoura, T. Mochizuki, S. Miyamoto, and S. Amano, "Soft x-ray emission from laser plasma of cryogenic mixture targets," Applied Physics Letters 75(14), pp. 2026-2028, 1999.
-
(1999)
Applied Physics Letters
, vol.75
, Issue.14
, pp. 2026-2028
-
-
Shimoura, A.1
Mochizuki, T.2
Miyamoto, S.3
Amano, S.4
-
26
-
-
34547630778
-
High resolution duo-multichannel soft x-ray spectrometer for tokamak plasma diagonstics
-
J. Schwob, A. Wouters, S. Suckewer, and M. Finkenthal, "High resolution duo-multichannel soft x-ray spectrometer for tokamak plasma diagonstics," Nucl. Instrum. Methods Phys. Res. A 58(9), pp. 1601-1615, 1987.
-
(1987)
Nucl. Instrum. Methods Phys. Res. A
, vol.58
, Issue.9
, pp. 1601-1615
-
-
Schwob, J.1
Wouters, A.2
Suckewer, S.3
Finkenthal, M.4
|