BioMEMS and micro-/nano-processing of polymers- An overview

Journal of the Chinese Institute of Chemical Engineers

Volumn 34, Issue 1, 2003, Pages 25-46

  Lee, L James ^a  

^a Ohio State University   (United States)

Author keywords

Biochips; BioMEMS; Drug delivery; Microfabrication; Microfluidics; Nanofabrication; Tissue scaffolds

Indexed keywords

BIOREACTORS; BIOSENSORS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; POLYMERS; SILICON;

DRUG DELIVERY DEVICES;

CHEMICAL ENGINEERING;

POLYMER;

BIOMEDICAL APPLICATION; FLUIDICS; INDUSTRIAL APPLICATION; MICROSTRUCTURE; POLYMER;

BIOSENSOR; DEVICE; DRUG DELIVERY SYSTEM; ELECTRONICS INDUSTRY; MICROELECTRONICS; NANOTECHNOLOGY;

EID: 0037729175     PISSN: 03681653     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (141)

1. Amass, W., A. Amass and B. Tighe "A Review of Biodegradable Polymers: Uses, Current Developments in the Synthesis and Characterization of Biodegradable Polyesters, Blends of Biodegradable Polymers and Recent Advances in Biodegradation Studies," Tighe, Polym. Int., 47, 89 (1998).
2. Becker, H. and W. Dietz, "Microfluidic Device for Micro-TAS Applications for Fabricated by Polymer Hot Embossing," Proc. SPIE, 3515, 177 (1998).
3. Becker, H. and C. Gartner, "Polymer Microfabrication Methods for Microfluidic Analytical Applications", Electrophoresis, 21, 12 (2000).
4. Bell, C. L. and N. A. Peppas, "Biomedical Membranes from Hydrogels and Interpolymer Complexes," Adv. Polym. Sci., 122, 125 (1995).
5. Bousse, L., C. Cohen, T. Nikiforov, A. Chow, A. R. Kopf-Sill, R. Dubrow and J. W. Parce, "Electrokinetically Controlled Microfluidic Analysis Systems," Annu. Rev. Biophys. Biomole. Struct., 29, 155 (2000).
6. Branebjerg, J., P. Gravesen, J. P. Krog and C. R. Nielsen, "Fast Mixing by Lamination," Proceedings IEEE Micro Electro Mechanical Systems (MEMS), p. 441 (1996).
7. Brondsted, H. and J. Kopecek, "pH-Sensitive Hydrogels. Characteristics and Potential in Drug Delivery," ACS Symposium Series, 480, 285 (1992).
8. Brott, L. L., R. R. Naik, D. J. Pikas, S. M. Kirkpatrick, D. W. Tomlin, P. W. Whitlock, S. J. Clarson and M. O. Stone, "Ultrafast Holographic Nanopatterning of Biocatalytically Formed Silica," Nature, 413, 291 (2001).
9. Cao, X., S. Lai and L. J. Lee, "Design of a Self-Regulated Drug Delivery Device," Biomedical Microdevices, 3(2), 109 (2001).
10. Carrilho, E., "DNA Sequencing by Capillary Array Electro-phoresis and Microfabricated Array Systems," Electro-phoresis, 21(1), 55 (2000).
11. Chen, J. W. and J. Zybko, "Laser Assembly Technology for Planar Microfludic Devices," SPE ANTEC Proc., 1153 (2002).
12. Choi, J. W. and C. H. Ahn, "An Active Micro Mixer Using Electrohydrodynamic (EHD) Convection," Solid-State Sensor & Actuator Workshop, Hilton Head, p.52 (2000).
13. Chou, C-.F., R. H. Austin, O. Bakajin, J. O. Tegenfeldt, J. A. Castelino, S. S. Chan, E. C. Cox, H. Craighead, N. Darnton, T. Duke, J. Han and S. Turner, "Sorting Biomolecules with Microdevices," Electrophoresis, 21, 81 (2000).
14. Chou, S. Y., P. R. Krauss and P. J. Renstrom, "Imprint Lithography with 25-Nanometer Resolution," Science, 272, 85 (1996).
15. Chou, S. Y., "Nanoimprint Lithography and Lithographically Induced Self-Assembly," MRS. Bulletin, p.521 (2001).
16. Colton, C. K., "Implantable Biohybrid Artificial Organs," Cell Transplantation, 4(4), 415 (1995).
17. Conlisk, A. T., J. McFerran, Z. Zheng and D. Hansford, "Mass Transfer and Flow in Electrically Charged Micro- and Nanochannels," Anal. Chem., 74, 2139 (2002).
18. Dam, T. H. and P. Pantano, "Nanotip Array Photoimprint Lithography," Rev. Sci. Inst., 70(10), 3982 (1999).
19. Deluca, P. P., R. C. Mehta, A. G. Hausberger and B. C. Thanoo, "Biodegradable Polyesters for Drug and Polypeptide Delivery," Polymeric Delivery Systems: Properties and Applications, ACS Symposium Series 520, M. A. El-Nokaly, D.M. Piatt B., A. Charpentier, ed., Chap.4, p.53 (1993).
20. Desai, T. A., D. J. Hansford, L. Kulinsky, A. H. Nashat, G. Rasi, J. Tu, Y. Wang, M. Zhang and M. Ferrari, "Nanopore Technology for Biomedical Applications," Biomedical Microdevices, 2(1), 11 (1999a).
21. Desai, T. A., D. J. Hansford and M. Ferrari, "Characterization of Micromachined Silicon Membranes for Immunoisolation and Bioseparation Applications," J. Membr. Sci., 159, 221 (1999b).
22. Desai, T. A., "Micro- and Nanoscale Structures for Tissue Engineering Constructs," Medical. Eng. Phys., 22, 595 (2000).
23. Desai, T. A., D. J. Hansford, L. Kulinsky, A. H. Nashat, G. Rasi, J. Tu, Y. Wang, M. Zhang and M. Ferrari, "Nanopore Technology for Biomedical Applications," Biomedical Microdevices, 2(1), 11 (2000).
24. Dunke, K., H.-D. Bauer, W. Ehrfeld, J. Hobfeld, L. Weber, G. Horcher and G. Muller, "Injection-Moulded Fiber Ribbon Connectors for Parallel Optical Links Fabricated by the LIGA Technique," J. Micromech. Microeng., 8, 301 (1998).
25. Edwards, D. A., "Delivery of Biological Agents by Aerosols," AIChE J., 48(1), 2 (2002).
26. Ehrfeld, W. and H. Lehr, "Deep X-ray Lithography for the Production of Three-Dimensional Microstructures from Metals, Polymers and Ceramics," Radiat. Phys. Chem., 45(3), 349 (1995).
27. Eichman, J. D., A. U. Bielinska, J. F. Kukowska-Latallo and J. R. Baker, "The Use of PAMAM Dendrimers in the Efficient Transfer of Genetic Material Into Cells," Pharm. Sci. Tech. Today, 3(7), 232 (2000).
28. Elwenspoek, M., T. S. J. Lammerink, R. Miyake and J. H. J. Fluitman, "Towards Integrated Microliquid Handling Systems," J. Micromech. Microeng., 4, 227 (1994).
29. Evans, J., D. Liepmann and A. P. Pisano, "Planar Laminar Mixer," Proceedings IEEE Micro Electro Mechanical Systems (MEMS), p.96 (1997).
30. Fahrenberg, J., W. Bier, D. Mass, W. Menz, R. Rupercht and W. K. Schomburg, "A Microvalve System Fabricated by Thermoplastic Molding," J. Micromech. Microeng., 5, 169 (1995).
31. Findlay, J. B., S. Atwood, M. L. Bergmeyer, J. Chemelli, K. Christy, T. Cummins, W. Donish, T. Ekeze, J. Falvo and D. Patterson, "Automated Closed-Vessel System for in Vitro Diagnostics Based on Polymerase Chain Reaction," Clin. Chem., 39, 1927 (1993).
32. Freemantle, M., "Downsizing Chemistry," Chem. Eng. News, p. 27, February 22 (1999).
33. Gad-el-Hak, M., "The Fluid Mechanics of Microdevices-Freeman Scholar Lecture," J. Fluids Eng., 121, 5 (1999).
34. Gallardo, B., V. K. Gupta, F. D. Eagerton, L. I. Jong, V. S. Craig, R. R. Shah and N. L. Abbott, "Electrochemical Principles for Active Control of Liquids on Submillimeter Scales," Science, 283, 57 (1999).
35. Giordano, N. and J.-T. Cheng, "Microfluid Mechanics: Progress and Opportunities," J. Phys: Condens. Matter, 13, R271 (2001).
36. Glasgow, I. K., D. J. Beebe and V. E. White, "Design Rules for Polyimide Solvent Bonding," Sensors and Materials, 11(5), 269 (1999).
37. Goll, C., W. Bacher, B. Bustgens, D. Maas, R. Ruprecht and W. K. Schomburg, "An Electrostatically Actuated Polymer Microvalve Equipped with a Movable Membrane Electrode," J. Micromech. Microeng., 7, 224 (1997).
38. Gracias, D. H., V. Kavthekar, J. C. Love, K. E. Paul and G. M. Whitesides, "Fabrication of Micrometer-Scale, Patterned Polyhedra by Self-Assembly," Adv. Mat. (Weinheim, Germany), 14(3), 235 (2002).
39. Green, P. W., R. R. A. Syms and E. M. Yeatman, J. "Demonstration of Three-Dimensional Microstructure Self-Assembly," J. Microelectromechanical Sys., 4(4), 170 (1995).
40. Griffith, L. G., "Polymeric Biomaterials," Acta Mater., 48, 263 (2000).
41. Griffith, L. G. and G. Noughton, "Tissue Engineering-Current Challenges and Expanding Opportunities," Science, 295 (5557), 1009 (2002).
42. Guan, J. and D. J. Hansford, "Fabrication of Polymeric Micro-Devices for Drug Delivery by Surface Patterning and Self-Folding," Patent pending (2002).
43. Hagmann, P. and W. Ehrfeld, "Fabrication of Microstructures of Extreme Structural Heights by Reaction Injection Molding," Int. Polym. Process., 4(3), 188 (1989).
44. Handique, K., D. T. Burke, C. H. Mastrangelo and M. A. Burns, "Nanoliter Liquid Metering in Microchannels Using Hydrophobic Patterns," Anal. Chem., 72, 4100 (2000).
45. Hanemann, T., R. Ruprecht and J. H. Haubelt, "Photomolding in Microsystem Technology," Polym Preprints, 39(2), 657 (1998).
46. Hansford, D., Private Communication, The Ohio State University, Columbus, Ohio, U.S.A. (2002).
47. Harsh, K. F., V. M. Bright and Y. C. Lee, "Solder Self-Assembly for Three-Dimensional Microelectromechanical Systems," Sens. Actuators, 77, 237 (1999).
48. Henry, S., D. V. McAllister, M. G. Allen and M. R. Prausnitz, "Microfabricated Microneedles: A Novel Approach to Transdermal Drug Delivery," J. Pharm. Sci., 87(8), 922 (1998).
49. Ho, C. M. and Y. C. Tai, "Micro-Electro-Mechanical-Systems (MEMS) and Fluid Flows," Ann. Rev. Fluid Mech., 30, 579 (1998).
50. Hoffman, A. S., "Hydrogels for Biomedical Applications," Adv. Drug Delivery Rev., 43, 3 (2002).
51. Huo, Q., J. Feng, F. Schüth and G. D. Stucky, "Preparation of Hard Mesoporous Silica Spheres," Chem. Mater., 9, 14 (1997).
52. Jacak, L., "Semiconductor Quantum Dots-Towards a New Generation of Semiconductor Devices," Eur. J. Phys., 21, 487 (2000).
53. Jain, R. A., "The Manufacturing Techniques of Various Drug Loaded Biodegradable Poly(lactide-co-glycolide) (PLGA) Devices," Biomaterials, 21, 1475 (2000).
54. Jensen, K. F., "Microchemical Systems: Status, Challenges and Opportunities," AIChE J., 45(10), 2051 (1999).
55. Jeoung, E., T. H. Galow, J. Schotter, M. Bal, A. Ursache, M. T. Tuominen, C. M. Stafford, T. P. Russell and V. M. Rotello. "Fabrication and Characterization of Nanoelectrode Arrays Formed via Block Copolymer Self-Assembly," Langmuir, 17, 6396 (2001).
56. Juang, Y.-J., L. J. Lee and K. W. Koelling, "Hot Embossing of Polymers for Microfabrication, Part I. Experimental," Polym. Eng. Sci., 42(3), 539 (2002).
57. Jun, T. K. and C.-J. Kim, "Valveless Pumping Using Traversing Vapor Bubbles in Microchannels," J. Appl. Phys., 83(11.part. 1), 5658 (1998).
58. Kaetsu, I., K. Uchida, H. Shindo, S. Gomi and K. Sutani, "Intelligent Type Controlled Release Systems by Radiation Techniques," Radiation Physics and Chemistry, 55, 193 (1999).
59. Kang, K., L. J. Lee and K. W. Koelling, "Rheological Analysis of Polymeric Solution in Micro-channels," paper submitted to Rheol. Acta. (2002).
60. Kelly, K. W., Proceedings of Novel Microfabrication Options for BioMEMS Conference, The Knowledge Foundation, San Francisco, CA, U.S.A. (1999).
61. Kim, K. J. and P.V. Stevens, "Hydraulic and Surface Characteristics of Membranes with Parallel Cylindrical Pores," J. Membr. Sci., 123, 303 (1997).
62. King, K. R., C. C. Wang, J. P. Vacanti and J. T. Borenstein, "Biodegradable Polymer Microfluidics for Tissue Engineering Microvasculature," MRS Spring Symposium (2002).
63. Koch, M., D. Chatelain, A. G. R. Evans and A. Brunnschweiler, "Two Simple Micromixers Based on Silicon," J. Micromech. Microeng, 8, 123 (1998).
64. Kresge, C. T., M. E. Leonowicz, W. J. Roth, J. C. Vartuli and J. S. Beck, "Ordered Mesoporous Molecular Sieves Synthesized by a Liquid-Crystal Template Mechanism," Nature, 359, 710 (1992).
65. Kricka, L. J., "Microchips, Microarrays, Biochips and Nanochips: Personal Laboratories for the 21st Century" Clin. Chim. Acta., 307, 219 (2001).
66. Krishnan, M., V. Namasivayam, R. Lin, R. Pal and M. A. Burns, "Microfabricated Reaction and Separation Systems," Current Opinion in Biotech., 12, 92 (2001).
67. Kroger, N., R. Deutzmann and M. Sumper, "Polycationic Peptides from Diatom Biosilica that Direct Silica Nanosphere Formation," Science, 286, 1129 (1999).
68. Kroger, N. and M. Sumper, "The Biochemistry of Silica Formation in Diatoms," Biomineralization, E. Baeuerlein, ed., p. 151 (2000).
69. Kulinsky, L., Y. Wang and M. Ferrari, "Electroviscous Effects in Microchannels," SPIE Proc., 3606, 158 (1999).
70. Lai, S., L. J. Lee, L. Yu, K. W. Koelling and M. J. Madou, "Micro- and Nano-Fabrication of Polymer Based Microfluidic Platforms for BioMEMS Applications," Materials Research Society Symposium Proceedings, 729, 17, (2002a).
71. Lai, S., Y. Hudiono, L. J. Lee, S. Daunert and M. J. Madou, "Gas-Resin Injection Technique for Bonding and Surface Modification of Polymer-Based Microfluidic Platforms," Annu. Tech. Conf. - Soc. Plast. Eng. 60th 3, 2703 (2002b).
72. Langer, R., "Drug Delivery and Targeting," Nature (Suppl.), 392, 5 (1998).
73. Langer, R. and J. P. Vacanti, "Tissue Engineering: the Design and Fabrication of Living Replacement Devices for Surgical Reconstruction and Transplantation," Lancet, 354, 23 (1999).
74. Langer, R., "Biomaterials in Drug Delivery and Tissue Engineering: One Laboratory's Experience," Acc. Chem. Res., 33(2), 94 (2000).
75. Lanza, R. P. and W. Chick, "Implantation of Uncoated Gel Particles Containing Living Donor Cells," Sci. Am. Sci. Med., 2(4), 16 (1995).
76. Lauks, I. R., "Microfabricated Biosensors and Micro-analytical Systems for Blood Analysis," Acc. Chem. Res., 31, 317 (1998).
77. Lee, L. J., M. J. Madou, K. W. Koelling, S. Daunert, S. Lai, C. G. Koh, Y.-J. Juang, Y. Lu and L. Yu, "Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Microfabrication," Biomedical Microdevice, 3(4), 339 (2001).
78. Lee, L. J. and M. J. Madou, Principles of Polymer Micro-/Nanofabrication for BioMEMS Applications, to be published.
79. Li, Y. and S.-T. Yang, "Review: Effects of Three-Dimensional Scaffold on Cell Organization and Tissue Development," Biotechnol. Bioprocess Eng., 6, 311 (2001).
80. Liu, R. H., Q. Yu, J. M. Bauer, J. S. Moore and D. J. Beebe, "Hydrogel Microvalves Fabricated Using in-situ Polymerization," Solid-State Sensor & Actuator Workshop, p.222 (2000).
81. Lowman, A. M. and N. A. Peppas, "Analysis of the Complexation/Decomplexation Phenomena in Graft Copolymer," Macromolecules, 30(15), 4959 (1997).
82. Lum, P. and M. Greenstein, "Microfluidic Structure Assembly with Mating Microfeatures," U.S. Patent 5, 932, 315 (1999).
83. TM: A Centrifuge-Based Microfluidic Platform for Diagnostics," Proc. SPIE, V3259, 80 (1998).
84. Madou, M. J., L. J. Lee, S. Daunert, S. Lai and C.-H. Shih, "Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Microfluidic Functions," Biomedical Microdevices, 3(3), 245 (2001).
85. Madou, M. J., Private Communication, ChipRx, Columbus, Ohio, U.S.A. (2001).
86. nd Ed., CRC Press, Boca Raton, FL, U.S.A. (2002).
87. Martin, C. R. K. and E. S. Snow, "Proximal Probe Lithography and Surface Modification," Microelectron. Eng., 32, 173 (1996).
88. McCormick, R. M., R. J. Nelson, M. G. Alonso-Amigo, D. J. Benvegnu and H. H. Hooper, "Microchannel Electrophoretic Separations of DNA in Injection-Molded Plastic Substrates," Anal. Chem., 69, 2626 (1997).
89. Metz, S., R. Holzer and P. Renaud, "Polyimide-Based Microfluidic Devices," Lab on a Chip, 1, 29 (2001).
90. Mikos, A. G., "Laminated Three-Dimensional Biodegradable Foams for Use in Tissue Engineering," Biomaterials, 14(5), 323 (1993).
91. Momma, C., S. Nolte, N. Chichkov, B. V. Alvensleben and F. A. Tunermann, "Precise Laser Ablation with Ultrashort Pulses," Appl. Surf. Sci., 109/110, 15 (1997).
92. Moroney, R. M., R. M. White and R. T. Howe, "Fluid Motion Produced by Ultrasonic Lamb Waves," Ultrasonics Symposium Proceedings, Honolulu, Hl, 1, 355, (1990).
93. Murphy, C. J. and J. L. Coffer, "Quantum dots: A Primer", Applied Spectroscopy, 56(1), 16A (2002).
94. Piotter, V., T. Hanemann, R. Ruprecht, A. Thies and J. Haubelt, "New Developments of Process Technologies for Microfabrication," Proc. SPIE, 3223, 91 (1997).
95. Piotter, V., T. Benzler, T. Hanemann, H. Wollmer, R. Ruprecht and J. Haubelt, "Innovative Molding Technologies for the Fabrication of Components for Microsystems," Proc. SPIE-the International Society for Optical Engineering, 3680, 456 (1999).
96. Pollack, M. G., R. B. Fair and A. D. Shenderov, "Comment on 'Analysis of Asymmetric Giant Magnetoimpedance in Field-Annealed Co-Based Amorphous Ribbon,' Appl. Phys. Lett. 75, 2114 (1999)", Appl. Phy. Lett., 77(11), 1725 (2000).
97. Quake, S. R. and A. Scherer, "From Micro- to Nanofabrication with Soft Materials," Science, 290, 1536 (2000).
98. Ramos, B. L., S. J. Choquette and F. F. Nicholas, "Embossable Grating Couplers for Planar Waveguide Optical Sensors," Anal. Chem., 68, 1245 (1996).
99. Ransohoff, T. C., P. A. Gauglitz and C. J. Radke, "Snap-Off of Gas Bubbles in Smoothly Constricted Noncircular Capillaries," AIChE J., 33(5), 753 (1987).
100. Ratner, B. D., "Surface Modification of Polymers: Chemical, Biological and Surface Analytical Challenges," Biosensors and Bioelectronics, 10, 797 (1995).
101. Roberts, M. A., J. S. Rossier, P. Bercier, H. Girault, "UV Laser Machined Polymer Substrates for the Development of Microdiagnostic Systems," Anal. Chem., 69(11), 2035 (1997).
102. Rossier, J. S. and H. H. Girault, "Enzyme Linked Immunosorbent Assay on a Microchip with Electrochemical Detection," Lab on a Chip, 1(2), 153 (2001).
103. Ruprecht, R., W. Bacher, J. Haubelt and V. Piotter, "Injection Molding of LIGA and LIGA-Similar Microstructures Using Filled and Unfilled Thermoplastics," Proc. SPIE, 2639, 146 (1995).
104. Sammarco, T. S. and M. A. Burns, "Thermocapillary Pumping of Discrete Drops in Microfabricated Analysis Devices," AIChE J., 45(2), 350 (1999).
105. Sanders, G. H. W. and A. Manz, "Chip-Based Microsystems for Genomic and Proteomic Analysis," Trends Anal. Chem., 19(6), 364 (2000).
106. Santini, J. T., Jr., M. J. Cima and R. Langer, "A Controlled-Release Microchip," Nature, 397, 335 (1999).
107. Sato, K., M. Tokeshi, T. Odake, H. Kimure, T. Ooi, M. Nakao and T. Kitamori, "Integration of an Immunosorbent Assay System: Analysis of Secretory Human Immuno-globulin A on Polystyrene Beads in a Microchip," Anal. Chem., 72(6), 1144 (2000).
108. Sayah, A., D. Solignac, T. Cueni and M. A. M. Gijs, "Development of Novel Low Temperature Bonding Technologies for Microchip Chemical Analysis Applications," Sens. Actuators A, 84, 103 (2000).
109. Schaffer, E., T. Thurn-Albrecht, T. P. Russell and U. Steiner, "Electrically Induced Structure Formation and Pattern Transfer," Nature, 403, 874 (2000).
110. Scheer, H.-C. and H. Schulz, "A Contribution to the Flow Behaviour of Thin Polymer Films during Hot Embossing Lithography," Microelectron. Eng., 56, 311 (2001).
111. Schift, H., C. David, M. Gabriel, J. Gobrecht, L. J. Heydermn, W. Kaiser, S. Koppel and L. Scandella, "Nanoreplication in Polymers Using Hot Embossing and Injection Molding," Microelectron. Eng., 53, 171 (1999).
112. Schift, H., L. J. Heyderman, M. A. D. Maur and J. Gobrecht, "Pattern Formation in Hot Embossing of Thin Polymer Films," Nanotechnology, 12, 173 (2001).
113. Schwarz, M. A. and P. C. Hauser, "Recent Developments in Detection Methods for Microfabricated Analytical Devices," Lab on a Chip, 1(1), 1 (2001).
114. Schwesinger, N., T. Frank and H. Wurmus, "A Modular Microfluidic System with an Integrated Micro Mixer," J. Micromech. Microeng., 6(1), 99 (1996).
115. Scranton, A. B., B. Rangarajan and J. Klier, "Biomedical Applications of polyelectrolytes," Adv. Polym. Sci., 122, 1 (1995).
116. th Ed., Semiconductor Fabtech (1998).
117. Shrewsbury, P. J., S. J. Muller and D. Liepmann, "Effect of Flow on Complex Biological Macromolecules in Microfluidic Devices," Biomedical Microdevices, 3(3), 325 (2001).
118. Smith, D. E., H. P. Babcock and S. Chu, "Single-Polymer Dynamics in Steady Shear Flow," Science, 283, 1724 (1999).
119. Snyder, M. R., "Micromolding Technology Extends Subgram Part Fabrication Capability" Mod. Plast., p.85 (1999).
120. Stone, H. A. and S. Kim, "Microfluidics: Basic Issues, Applications, and Challenges," AlChE J., 47(6), 1250 (2001).
121. Stroock, A. D., M. Weck, D. T. Chiu, W. T. S. Huck, P. J. A. Kenis, R. F. Ismagilov and G. M. Whitesides, "Patterning Electro-Osmotic Flow with Patterned Surface Charge," Phys. Rev. Lett., 84(15), 3314 (2000).
122. Sugimura, H., O. Takai and N. Nakagiri, "Multilayer Resist Films Applicable to Nanopatterning of Insulating Substrates Based on Current-injecting Scanning Probe Lithography," J. Vac. Sci. Technol., 17(4), 1605 (1999).
123. Texter, J. and M. Tirrell, "Chemical Processing by Self-Assembly," AlChE J., 47(8), 1706 (2001).
124. Thurn-Albrecht, T., J. Schotter, G. A. Kastle, N. Emley, T. Shibauchi, L. Krusin-Elbaum, K. Guarini, C. T. Black, M. T. Tuominen and T. P. Russell, "Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates," Science, 290, 2126 (2000).
125. Tolbert, S. H., A. Firouzi, G. D. Stucky and B. F. Chmelka, "Magnetic Field Alignment of Ordered Silicate-Surfactant Composites and Mesoporous Silica," Science, 278, 264 (1997).
126. Torres-Lugo, M. and N. A. Peppas, "Molecular Design and in Vitro Studies of Novel pH-Sensitive Hydrogels for the Oral Delivery of Calcitonin," Macromolecules, 32(20), 6646 (1999).
127. Traitel, T., Y. Cohen and J. Kost, "Characterization of Glucose-Sensitive Insulin Release Systems in Simulated in Vivo Conditions," Biomaterials, 21, 1679 (2000).
128. Tucker, C. L., ed., Computer Modeling for Polymer Processing, Hanser Publishers, New York, U.S.A. (1989).
129. Vo-Dinh, T. and B. Cullum, "Biosensors and Biochips: Advances in Biological and Medical Diagnostics," Fresenius J. Anal. Chem., 366, 540 (2000).
130. Wang, J., "Glucose Biosensors: 40 Years of Advances and Challenges," Electroanalysis, 13(12), 983 (2001).
131. Wang, K. L. and A. A. Balandin, Optics of Nanostructured Materials, V. A. markel and T. F. George ed., Chap. 12, p.515, Wiley Interscience, New York, U.S.A. (2001).
132. Warrington, R. O., "An Overview of Micromechanical Machining Processes for BioMEMS," Proceedings of Novel Microfabrication Options for BioMEMS Conference, Chap. 7, p. 67 (1999).
133. Wilder, K., C. F. Quate, B. Singh and D. F. Kyser, "Electron Beam and Scanning Probe Lithography: A Comparison," J. Vac. Sci. Technol. B, 16(6), 3864 (1998).
134. Wimberger-Friedl, R., "Injection Molding of Sub-μm Grating Optical Elements," Proc. SPE ANTEC, 57(1), 476 (1999).
135. Woias, P., K. Hauser and E. Yacoub-George, "An Active Silicon Micromixer for μTAS Applications," Micro Total Analysis Systems, p. 277 (2000).
136. Xia, Y. and G. M. Whitesides, "Soft Lithography," Angew. Chem. Int. E., 37, 550 (1998).
137. Xia, Y., J. A. Rogers, K. E. Paul and G. M Whitesides, "Unconventional Methods for Fabricating and Patterning Nanostructures," Chem. Rev., 99(7), 1823 (1999).
138. Yang, P., D. Zhao, B. F. Chmelka and G. D. Stucky, "Triblock-Copolymer-Directed Syntheses of Large-Pore Mesoporous Silica Fibers," Chem. Mater., 10(8), 2033 (1998).
139. Yu, L., C. G. Koh, L. J. Lee and K. W. Koelling, "Experimental Investigation and Numerical Simulation of Injection Molding with Micro-Features," Polym. Eng. Sci., 42, 871, (2002).
140. Yue, J., Z. H. Wang, K. R. Cromack, A. J. Epstein and A. G. MacDiarmid, "Effect of Sulfonic Acid Group on Polyaniline Backbone," J. Am. Chem. Soc., 113, 2665 (1991).
141. Zhao, D., P. Yang, B. F. Chmelka and G. D. Stucky, "Multiphase Assembly of Mesoporous-Macroporous Membranes," Chem. Mater., 11(5), 1174 (1999).