New developments of process technologies for microfabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3223, Issue , 1997, Pages 91-99

  Piotter, V ^a   Hanemann, T ^a   Ruprecht, R ^a   Thies, A ^a   Hausselt J ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Electroforming; Injection molding; Liga; Microsystems technology; MIM; Photopolymerization

Indexed keywords

COMPOSITE MICROMECHANICS; CONDUCTING POLYMERS; ELECTROCHEMISTRY; ELECTROFORMING; ELECTROMETALLURGY; INJECTION MOLDING; MACHINING; METAL MOLDING; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; MICROSTRUCTURE; MICROSYSTEMS; MIM DEVICES; MOLDING; MOLDS; PHOTOPOLYMERIZATION; PHOTORESISTS; PLASTIC MOLDS; POLYMERIC GLASS; POLYMERIZATION; POLYMERS; RESINS; TECHNOLOGY;

AMBIENT TEMPERATURES; CYCLE TIMES; ECONOMIC FACTORS; ECONOMIC SUCCESSES; FILLED POLYMERS; GEAR WHEELS; LIGA; LOW VISCOSITIES; MATERIALS PROCESSING TECHNOLOGIES; METAL INJECTION MOLDINGS; METAL MICROSTRUCTURES; MICRO MOLDINGS; MICROSYSTEMS TECHNOLOGY; MIM; MOLDING TOOLS; NEW DEVELOPMENTS; PERFORMANCE POLYMERS; PHOTOINDUCED POLYMERIZATIONS; PHOTOPOLYMERIZABLE RESINS; PLASTIC MICROSTRUCTURES; POLYMER PRECURSORS; PROCESS TECHNOLOGIES; PROCESSING TECHNOLOGIES; SIMULATION TECHNIQUES; TIME CONSUMING;

REACTION INJECTION MOLDING;

EID: 0006833914     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284469     Document Type: Conference Paper

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