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Volumn 30, Issue , 1998, Pages 579-612

Micro-electro-mechanical-systems (MEMS) and fluid flows

Author keywords

Flow control; MEMS; Micro transducers; Size effect; Surface force

Indexed keywords


EID: 1542786313     PISSN: 00664189     EISSN: None     Source Type: Book Series    
DOI: 10.1146/annurev.fluid.30.1.579     Document Type: Article
Times cited : (1363)

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