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Microelectronic Engineering

Volumn 32, Issue 1-4 SPEC. ISS., 1996, Pages 173-189

Proximal probe lithography and surface modification

(2) Marrian, C R K a Snow, E S a

a NAVAL RESEARCH LABORATORY (United States)

Author keywords

Lithography; Proximal probes; Surface modification

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARGED PARTICLES; FOCUSING; PROXIMITY SENSORS; SCANNING TUNNELING MICROSCOPY; SURFACE PROPERTIES;

PROXIMAL PROBES;

LITHOGRAPHY;

EID: 0030234388 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/0167-9317(96)00005-6 Document Type: Article

Times cited : (24)

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