A modular microfluid system with an integrated micromixer

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 99-102

  Schwesinger, Norbert ^a   Frank, Thomas ^a   Wurmus, Helmut ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MIXING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

INTEGRATED MICROMIXERS; MODULAR MICROFLUID SYSTEMS;

MIXERS (MACHINERY);

EID: 0030091405     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/023     Document Type: Article

References (8)

1. Shoji S, Nakagawa S and Esashi M 1990 Micropump and sample-injector for integrated chemical analysing systems Sensors Actuators A21-23 189-92
2. Lammerink T S J, Elwenspoek M and Fluitman J H J 1993 Integrated microliquid dosing system MEMS '93 (Travemünde 1993) p 258
3. Zengerle R, Kluge S, Richter M and Richter A 1995 A bidirectional silicon micropump MEMS'95 (Amsterdam 1995) pp 19-24
4. Schwesinger N 1993 Planarer tintenstrahldruckkopf mit piezokeramischem antrieb Feinwerk Mikrotech. 101 H. 11-2, S. 456-60
5. Mensinger H, Richter T, Hessel V, Döpper J and Ehrfeld W 1994 Microreader with integrated staticmixer and analysis system Micro Total Analysis Systems (Enschede 1994) pp 237-43
6. Fan S-L, Tai Y-C and Muller R S 1988 Integrated moveable micromechanical structures for sensors and actuators IEEE Trans. Electron Devices ED-35 724-30
7. Tai Y-C and Muller R S 1989 IC-processed electrostatic synchronous micromotors Sensors Actuators 20 49-55
8. Fan L-S, Tai Y-C and Muller R S 1989 IC-processed electrostatic micromotors Sensors Actuators 20 41-7