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85037276338
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Multilevel nanoimprint lithography with submicron alignment on 4″ wafers
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Palm Springs, CA, May 30-June 2
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W. Zhang and S.Y. Chou, "Multilevel Nanoimprint Lithography with Submicron Alignment on 4″ Wafers," presented at the 44th Int. Conf. on Electron, Ion and Photo Beam Technology and Fabrication (EIPBN), Palm Springs, CA, May 30-June 2, 2000.
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44th Int. Conf. on Electron, Ion and Photo Beam Technology and Fabrication (EIPBN)
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Zhang, W.1
Chou, S.Y.2
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10
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85037268841
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(unpublished); H.I. Smith (unpublished)
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Pease, F.R.W.1
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Appl. Phys. Lett.
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17
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Appl. Phys. Lett.
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0000928605
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T.I. Kamins, D.A.A. Ohlberg, R.S. Williams, W. Zhang, and S.Y. Chou, Appl. Phys. Lett. 74 (1999) p. 1773.
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Appl. Phys. Lett.
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85037289921
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Concentric ring patterns in polymer films formed by lithographically-induced self-assembly
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Palm Springs, CA, May 30-June 2
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P. Deshpande, L. Chen, L. He, and S.Y. Chou, "Concentric Ring Patterns in Polymer Films Formed by Lithographically-Induced Self-Assembly," presented at the 44th Int. Conf. on Electron, Ion and Photo Beam Technology and Fabrication (EIPBN), Palm Springs, CA, May 30-June 2, 2000.
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(2000)
44th Int. Conf. on Electron, Ion and Photo Beam Technology and Fabrication (EIPBN)
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-
Deshpande, P.1
Chen, L.2
He, L.3
Chou, S.Y.4
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