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Volumn 16, Issue 6, 1998, Pages 3864-3873
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Electron beam and scanning probe lithography: A comparison
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 11744339064
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.590425 Document Type: Article |
Times cited : (92)
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References (12)
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