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Volumn 121, Issue 1, 1999, Pages 5-33

The fluid mechanics of microdevices—the freeman scholar lecture

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT LAYOUT; MACHINE COMPONENTS; MACHINE DESIGN; MICROELECTROMECHANICAL DEVICES; TECHNOLOGY TRANSFER;

EID: 0032632334     PISSN: 00982202     EISSN: 1528901X     Source Type: Journal    
DOI: 10.1115/1.2822013     Document Type: Article
Times cited : (1280)

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