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Volumn 12, Issue 3, 2002, Pages 442-448

Deposition of yttria-stabilized zirconia thin films by atomic layer epitaxy from β-diketonate and organometallic precursors

(5) Putkonen, Matti a Sajavaara, Timo a Niinistö, Jaakko a Johansson, Leena Sisko a Niinistö, Lauri a

a AALTO UNIVERSITY (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; DIKETONE; ORGANOMETALLIC COMPOUND; OXYGEN; OZONE; YTTRIUM; ZIRCONIUM DERIVATIVE; ZIRCONIUM OXIDE;

ARTICLE; ATOM; ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; FILM; MOLECULAR STABILITY; PRECURSOR; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; SURFACE PROPERTY; TEMPERATURE; X RAY DIFFRACTION; X RAY FLUORESCENCE;

EID: 0036202258 PISSN: 09599428 EISSN: None Source Type: Journal
DOI: 10.1039/b107799f Document Type: Article

Times cited : (50)

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