Yttria-stabilized zirconia (YSZ) heteroepitaxially grown on Si substrates by reactive sputtering

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 381-389

  Hata, Tomonobu ^a   Sasaki, Kenji ^a   Ichikawa, Yohko ^b   Sasaki, Kimihiro ^a  

^a KANAZAWA UNIVERSITY   (Japan)

^b RITE   (Japan)

Author keywords

Heteroepitaxial growth; Reactive sputtering; YSZ on Si; Yttria stabilized zirconia (YSZ)

Indexed keywords

EID: 0000539574     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00291-8     Document Type: Article

References (5)

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