Finite Element modeling of a silicon tactile sensor

Sensors and Materials

Volumn 9, Issue 4, 1997, Pages 197-213

  Garvey, Joseph ^a   Beebe, David ^b   Denton, Denice D ^c  

^a Sentry Equipment Corporation   (United States)

^b University of Illinois at Urbana Champaign   (United States)

^c University of Washington   (United States)

Author keywords

Diaphragm; Finite element modeling; Piezoresistive; Silicon; Tactile sensor

Indexed keywords

EID: 0031517415     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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