A coupled numerical technique for self-consistent analysis of micro-electro-mechanical-systems

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 59, Issue , 1996, Pages 275-280

  Aluru, N R ^a   White, J ^a  

^a USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BOUNDARY ELEMENT METHOD; CONVERGENCE OF NUMERICAL METHODS; FINITE ELEMENT METHOD;

SELF CONSISTENT ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 0042568566     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (19)

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