Effect of air damping on the dynamics of nonuniform deformations of microstructures

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1093-1096

  Yang, Yao Joe ^a   Gretillat, Marc Alexis ^a   Senturia, Stephen D ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; DAMPING; MICROSTRUCTURE; MODAL ANALYSIS; OSCILLATIONS;

COMPRESSIBLE ISOTHERMAL SQUEEZED FILM DAMPING; NONUNIFORM DEFORMATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030715786     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)