Coupled FEM simulation for the characterization of the fluid flow within a micromachined cantilever valve

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 112-114

  Koch, M ^a   Evans, A G R ^a   Brunnschweiler, A ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; FLOW OF FLUIDS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PRESSURE CONTROL; SEMICONDUCTING SILICON;

MICROMACHINED CANTILEVER VALVE; SOFTWARE PACKAGE ANSYS; SOFTWARE PACKAGE FLOW3D;

VALVES (MECHANICAL);

EID: 0030092114     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/027     Document Type: Article

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