Material property measurements of micromechanical polysilicon beams

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2880, Issue , 1996, Pages 39-45

  Gupta, Raj K ^a   Osterberg, Peter M ^a   Senturia, Stephen D ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; ELECTROSTATICS; FABRICATION; MICROMACHINING; RESIDUAL STRESSES; SEMICONDUCTING SILICON; STRAIN;

POLYSILICON; WAFER-LEVEL PROBING;

MICROELECTRONICS;

EID: 0030393833     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.250952     Document Type: Conference Paper

References (18)