Micromachining of (hhl) silicon structures: Experiments and 3D simulation of etched shapes

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 168-175

  Tellier, Collette R ^a,c   Durand, Stéphane ^a,b  

^a Electron et Piezoelectricite   (France)

^b UNIVERSITÉ DU MAINE   (France)

^c UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

Etching; Micromachining; Silicon plates; Simulations

Indexed keywords

COMPUTER SIMULATION; ETCHING; MATHEMATICAL MODELS; MICROMACHINING; MICROSTRUCTURE; POTASSIUM COMPOUNDS; THREE DIMENSIONAL;

POTASSIUM HYDROXIDE; SILICON PLATES; TENSORIAL MODEL; WATER ETCHANT;

SILICON SENSORS;

EID: 0031146711     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01418-5     Document Type: Article

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