SOLIDIS: A tool for microactuator simulation in 3-D

Journal of Microelectromechanical Systems

Volumn 6, Issue 1, 1997, Pages 70-81

  Funk, Jörg M ^a,b,c,d,e   Korvink, J G ^a,b,f,g,h   Bühler, Johannes ^b,i   Bächtold, Martin ^a,b   Baltes, Henry ^a,b  

^a IEEE   (Switzerland)

^b ETH ZURICH   (Switzerland)

^c Siemens Schweiz AG   (Switzerland)

^d SIEMENS AG   (Germany)

^e SYNOPSYS SWITZERLAND LLC   (Switzerland)

^f UNIVERSITY OF CAPE TOWN   (South Africa)

^g Foodstuff Sensor Project

^h ASME   (Switzerland)

ⁱ UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

Actuators; Coupled effects; Simulation; SOLIDIS

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MONTE CARLO METHODS; OPTIMIZATION; PARTIAL DIFFERENTIAL EQUATIONS; PIEZOELECTRICITY; THERMAL EXPANSION; THERMODYNAMICS; THREE DIMENSIONAL;

ADAPTIVE MESH REFINEMENT; CMOS PROCESS; COUPLED EFFECTS; ELECTROSTATIC FORCE; ELECTROTHERMOMECHANICAL ACTUATION; MICROACTUATOR SIMULATION; MICROMOTORS; THERMOMECHANICS; ZONE PARTITIONING;

ACTUATORS;

EID: 0031097516     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.557533     Document Type: Article

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