Finite-element modeling of the transient response of MEMS sensors

Smart Materials and Structures

Volumn 6, Issue 1, 1997, Pages 53-61

  Lim, Young Hun ^a   Varadan, Vasundara V ^a   Varadan, Vijay K ^a  

^a The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC RESPONSE; EQUATIONS OF MOTION; FINITE ELEMENT METHOD; FLOW OF FLUIDS; SENSORS;

MICRO FLUID FLOW SENSOR; PIEZOELECTRIC CERAMIC SENSORS; PULSED FLOW SENSING; TRANSIENT RESPONSE;

MICROELECTROMECHANICAL DEVICES;

EID: 0031077069     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/6/1/007     Document Type: Article

References (13)

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