An approach to macromodeling of MEMS for nonlinear dynamic simulation

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 59, Issue , 1996, Pages 401-407

  Ananthasuresh, G K ^a   Gupta, Raj K ^a   Senturia, Stephen D ^a  

^a USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DYNAMICS; NATURAL FREQUENCIES; VOLTAGE MEASUREMENT;

LINEAR NORMAL MODE SUMMATION METHOD;

MICROELECTROMECHANICAL DEVICES;

EID: 0030349223     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (15)

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