Simulation model for micromechanical angular rate sensor

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 113-121

  Veijola, Timo ^a   Kuisma, Heikki ^b   Lahdenperä, Juha ^b   Ryhänen, Tapani ^c  

^a AALTO UNIVERSITY   (Finland)

^b VTI Hamlin OY   (Finland)

^c NOKIA SIEMENS NETWORKS   (Finland)

Author keywords

Angular rate sensors; Circuit simulation; Micromechanics

Indexed keywords

CAPACITANCE; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; ELECTROSTATICS; EQUIVALENT CIRCUITS; FREQUENCY DOMAIN ANALYSIS; GYROSCOPES; MATHEMATICAL MODELS; RESONANT CIRCUITS; TIME DOMAIN ANALYSIS; TORQUE; VIBRATIONS (MECHANICAL);

ANGULAR RATE SENSORS; CAPACITANCE VOLTAGE CHARACTERISTICS; CORIOLIS FORCE;

SENSORS;

EID: 0031147616     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01382-4     Document Type: Article

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