Modeling electrostatically deflectable microstructures and air damping effects

Sensors and Materials

Volumn 8, Issue 5, 1996, Pages 251-269

  Reuther, H M ^a   Weinmann, M ^a,b   Fischer, M ^a   Von Munch, W ^a   Assmus F ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

^b FESTO AG AND CO KG   (Germany)

Author keywords

Air damping effects; Coupling of heterogeneous simulation tools; Electrostatically deflectable polysilicon microstructures; Modeling of electrostatic fields; Modeling of hydrodynamic fields; Modeling of microstructures; Quartz resonator

Indexed keywords

EID: 20544467941     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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