Model for gas film damping in a silicon accelerometer

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1097-1100

  Veijola, Timo ^a   Kuisma, Heikki ^a   Lahdenpera, Juha ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; DAMPING; FILMS; MATHEMATICAL MODELS; NUMERICAL METHODS; VISCOSITY OF GASES;

ACCOMODATION COEFFICIENT; GAS FILM DAMPING; LINEARIZED BOLTZMANN EQUATION; SILICON ACCELEROMETER;

ACCELEROMETERS;

EID: 0030710897     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)