Optimization of the geometry of electrostatic micromotors using only analytical equations

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 108-111

  Dufour, Isabelle ^a   Sarraute, Emmanuel ^a   Abbas, Ahmed ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTIMIZATION;

ELECTROSTATIC MICROMOTORS;

ELECTRIC MOTORS;

EID: 0030091404     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/026     Document Type: Article

References (14)

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