Accuracy assessment of 2-D and 3-D finite-element models of a double-stator electrostatic wobble motor

Journal of Microelectromechanical Systems

Volumn 6, Issue 2, 1997, Pages 142-150

  Sangster, A J ^{a,b,c,d,e,f,g}   Samper, Victor D ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF ABERDEEN   (United Kingdom)

^c Ferranti Ltd   (United Kingdom)

^d Plessey Radar Ltd   (United Kingdom)

^e Heriot Watt University ^*  (United Kingdom)

^f Institution of Electrical Engineers   (United Kingdom)

^g Electromagnetics Academy   (United States)

Author keywords

Electrostatic; Finite element; LIGA; Micromotor; Wobble motor

Indexed keywords

COMPUTER SIMULATION; ELECTRIC MOTORS; ELECTROSTATICS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; OPTIMIZATION; TORQUE;

SIMULATION ACCURACY;

MICROELECTROMECHANICAL DEVICES;

EID: 0031165592     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.585792     Document Type: Article

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