Tunable laser diode using a nickel micromachined external mirror

Electronics Letters

Volumn 32, Issue 13, 1996, Pages 1207-1208

  Uenishi, Y ^a   Honma, K ^a   Nagaoka, S ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Laser tuning; Micromachining; Optical fabrication

Indexed keywords

ELECTROSTATIC DEVICES; FABRICATION; LASER TUNING; MICROMACHINING; MIRRORS; NICKEL; SCANNING ELECTRON MICROSCOPY;

ELECTROSTATIC COMB DRIVE; EXTERNAL CAVITY; NICKEL MICROMIRROR; OPTICAL FABRICATION; WAVELENGTH TUNABILITY;

SEMICONDUCTOR LASERS;

EID: 0030169205     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19960801     Document Type: Article

References (6)

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3. LIN, L.Y., LEE, S.S., PISTER, K.S.J., and WU, M.C.: 'Three dimensional micro-Fresnel optical elements fabricated by micromachining technique', Electron. Lett., 1994, 30, (5), pp. 448-449
4. LIN, L.Y., LEE, S.S., PISTER, K.S.J., and WU, M.C.: 'Micromachined three dimensional micro-optics for integrated free-space optical system', IEEE Photonics Technol. Lett., 1994, PTL-6, pp. 1445-1447
5. UENISHI, Y., TSUGAI, M., and MEHREGANY, M.: 'Hybrid-integrated micromirror of laser-diode fabricated by (110) silicon micromachining', Electron. Lett., 1995, 31, (12), pp. 965-966
6. UENISHI, Y., TSUGAI, M., and MEHREGANY, M.: 'Micro-opto mechanical devices fabricated by anisotropic etching of (110) silicon', J. Micromech. Microeng., 1995, 5, pp. 305-312