Electrostatically-tunable switching micromirror using (110) silicon wafers

LEOS Summer Topical Meeting

Volumn , Issue , 1996, Pages

  Seo, Kyoung Sun ^a   Cho, Young Ho ^a   Youn, Sung Kie ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; ELECTROSTATICS; ETCHING; FABRICATION; NATURAL FREQUENCIES; OPTICAL FILTERS; OPTICAL SHUTTERS; OPTICAL SWITCHES; SILICON WAFERS; SWITCHING;

ELECTROSTATIC DRIVE TEST; ELECTROSTATICALLY TUNABLE SWITCHING MICROMIRROR; MICROSWITCHING DEVICES; OPTOMECHANICAL SWITCHING MICRODEVICES; STATIC DEFLECTIONS; THRESHOLD VOLTAGE;

MIRRORS;

EID: 0029717160     PISSN: 10994742     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)