Vertical mirrors fabricated by reactive ion etching for fiber optical switching applications

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 49-54

  Marxer, C ^a   Gretillat, M A ^a   de Rooij, N F ^a   Battig, R ^a   Anthamatten, O ^a   Valk, B ^a   Vogel, P ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; OPTICAL COATINGS; OPTICAL FIBER COUPLING; OPTICAL SWITCHES; REACTIVE ION ETCHING; SILICON; SURFACE ROUGHNESS;

VERTICAL MIRRORS;

MIRRORS;

EID: 0030679958     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)