Development of micro-electro-mechanical optical scanner

Optical Engineering

Volumn 36, Issue 5, 1997, Pages 1346-1353

  Motamedi, M Edward ^a,b   Park, Sangtae ^b   Wang, Anhua ^b,e,f,g   Dadkhah, Mahyar S ^b,h,i   Andrews, Angus P ^{b,i,j,k,l,m,n,o,p}   Marcy, Henry O ^b,l,q,r,s,t   Khoshnevisan, Moshen ^{a,b,i,m,n,u,v,w}   Chiou, Arthur E ^a,b,m,x,y,z   Huhn, Richard J ^c,aa,ab   Sell, Curtis F ^c,aa,ac   Smits, Johannes G ^d,m,ad,ae,af  

^a International Society for Optics and Photonics   (United States)

^b ROCKWELL SCIENCE CENTER   (United States)

^c ROCKWELL AUTOMATION   (United States)

^d Boston University   (United States)

^e HEFEI UNIVERSITY   (China)

^f UNIVERSITY OF CALGARY   (Canada)

^g Namco Control Corporation   (United States)

^h UNIVERSITY OF WASHINGTON   (United States)

ⁱ Science Center

^j MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^k UNIVERSITY OF CALIFORNIA   (United States)

^l Sigma Xi   (United States)

^m IEEE

ⁿ IEEE ^*

^o MAA   (Argentina)

^p AIAA   (United States)

^q Tau Beta Pi   (United States)

^r Eta Kappa Nu   (United States)

^s Inst Elec Electronics Engineers

^t NORTHWESTERN UNIVERSITY   (United States)

^u SAN JOSE STATE UNIVERSITY   (United States)

^v MICHIGAN STATE UNIVERSITY   (United States)

^w BOEING COMPANY   (United States)

^x CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^y IBM RESEARCH   (United States)

^z OPTICAL SOCIETY OF AMERICA   (United States)

^aa Rockwell Automation/Allen Bradley   (United States)

^ab MARQUETTE UNIVERSITY   (United States)

^ac GRINNELL COLLEGE   (United States)

^ad LEIDEN UNIVERSITY   (Netherlands)

^ae STANFORD UNIVERSITY   (United States)

^af BOSTON UNIVERSITY   (United States)

more..

Author keywords

Bimorph; Laser diode; Micro electro mechanical systems; Micro optics; Micro opto electro mechanical systems; Optical scanner

Indexed keywords

EID: 6944238574     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601357     Document Type: Article

References (18)

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