Quantitative analysis of scratch drive actuation for integrated X/Y motion system

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 773-776

  Langlet, P ^a   Collard, D ^a   Akiyama, T ^a   Fujita, H ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; MATHEMATICAL MODELS; MECHANICAL DRIVES; MECHANICS; NUMERICAL ANALYSIS; SEMICONDUCTOR DEVICE MANUFACTURE;

SCRATCH DRIVE ACTUATORS; SILICON SURFACE MACHINING; STEP MOTION;

ACTUATORS;

EID: 0030700079     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)