|
|
|
Volumn , Issue , 1996, Pages
|
|
Si micromachined 2D optical scanning mirror and its application to scanning sensors
a
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
INTEGRATED OPTOELECTRONICS;
MICROMACHINING;
OPTICAL SENSORS;
PERFORMANCE;
PHOTODIODES;
PIEZOELECTRIC MATERIALS;
RESISTORS;
SCANNING;
SEMICONDUCTING SILICON;
THREE DIMENSIONAL;
VISION;
INTEGRATED OPTICAL SCANNER;
OPTICAL SCANNER;
OPTICAL SCANNING;
OPTICAL SCANNING MIRROR;
PHOTO DETECTION;
PIEZORESISTORS;
SCANNING POSITION DETECTION;
SCANNING SENSORS;
SILICON BULK MICROMACHINING;
TWO DIMENSIONAL;
MIRRORS;
|
|
EID: 0029708186
PISSN: 10994742
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (2)
|
|
References (4)
|
