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Optical Engineering

Volumn 36, Issue 5, 1997, Pages 1399-1407

Micromachined electromagnetic scanning mirrors

(2) Miller, Raanan A a,b,c,d Tai, Yu Chong b,d,e

a International Society for Optics and Photonics (United States)

b California Institute of Technology (United States)

c BOSTON UNIVERSITY (United States)

d CALIFORNIA INSTITUTE OF TECHNOLOGY (United States)

e UNIVERSITY OF CALIFORNIA (United States)

Author keywords

Electromagnetic actuation; Holographic data storage; Laser scanning mirror; Micro opto electro mechanical systems; Permalloy

Indexed keywords

EID: 0001272349 PISSN: 00913286 EISSN: None Source Type: Journal
DOI: 10.1117/1.601348 Document Type: Article

Times cited : (38)

References (6)

1
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- Bryzek, J.¹ Petersen, K.²

2
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- A micromachined permalloy magnetic actuator array for micro robotics assembly systems
- Royal Swedish Academy of Engineering Sciences, IVA, and the 1995 Foundation for Sensor and Activator Technology, Stockholm, Sweden
- C. Liu, T. Tsao, Y. C. Tai, "A micromachined permalloy magnetic actuator array for micro robotics assembly systems," in Proc. 8th International Conference on Solid-State Sensors and Actuators (Transducers 95), Vol. 1, pp. 328-331, Royal Swedish Academy of Engineering Sciences, IVA, and the 1995 Foundation for Sensor and Activator Technology, Stockholm, Sweden (1995).
- (1995) Proc. 8th International Conference on Solid-State Sensors and Actuators (Transducers 95) , vol.1 , pp. 328-331
- Liu, C.¹ Tsao, T.² Tai, Y.C.³

3
- 0029488598
- Magnetic microactuation of torsional polysilicon structures
- Royal Swedish Academy of Engineering Sciences, IVA, and the 1995 Foundation for Sensor and Activator Technology, Stockholm, Sweden
- J. W. Judy and R. S. Muller, "Magnetic microactuation of torsional polysilicon structures," in Proc. 8th International Conference on Solid-State Sensors and Actuators (Transducers 95), Vol. 1, pp. 332-335, Royal Swedish Academy of Engineering Sciences, IVA, and the 1995 Foundation for Sensor and Activator Technology, Stockholm, Sweden (1995).
- (1995) Proc. 8th International Conference on Solid-State Sensors and Actuators (Transducers 95) , vol.1 , pp. 332-335
- Judy, J.W.¹ Muller, R.S.²

4
- 0029489895
- Out-of plane permalloy magnetic actuators for delta-wing control
- C. Liu, T. Tsao, Y. C. Tai, J. Leu, T. S. Leu, C. M. Ho, W. L. Tang, and D. Miu, "Out-of plane permalloy magnetic actuators for delta-wing control," in Proc. IEEE International Workshop on Micro Electro Mechanical Systems (MEMS 95), pp. 328-331 (1995).
- (1995) Proc. IEEE International Workshop on Micro Electro Mechanical Systems (MEMS 95) , pp. 328-331
- Liu, C.¹ Tsao, T.² Tai, Y.C.³ Leu, J.⁴ Leu, T.S.⁵ Ho, C.M.⁶ Tang, W.L.⁷ Miu, D.⁸

5
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- Electromagnetic MEMS scanning mirrors for holographic data storage
- Transducers Research Foundation, Inc., Hilton Head, SC
- R. A. Miller, G. W. Burr, Y. C. Tai, D. Psaltis, C. M. Ho, and R. Katti, "Electromagnetic MEMS scanning mirrors for holographic data storage," in Proc. Solid-State Sensor and Actuator Workshop, pp. 183-186, Transducers Research Foundation, Inc., Hilton Head, SC (1996).
- (1996) Proc. Solid-State Sensor and Actuator Workshop , pp. 183-186
- Miller, R.A.¹ Burr, G.W.² Tai, Y.C.³ Psaltis, D.⁴ Ho, C.M.⁵ Katti, R.⁶

6
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- Holographic memories
- D. Psaltis and F. H. Mok, "Holographic memories," Sci. Am. 273(5), 70-75 (1995).
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- Psaltis, D.¹ Mok, F.H.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.