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Volumn , Issue , 1997, Pages 1-704
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Micromechanics and MEMS: Classic and seminal papers to 1990
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 85051990832
PISSN: None
EISSN: None
Source Type: Book
DOI: 10.1109/9780470545263 Document Type: Book |
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Times cited : (128)
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References (0)
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