Micro-opto-electro-mechanical devices and on-chip optical processing

Optical Engineering

Volumn 36, Issue 5, 1997, Pages 1282-1297

  Motamedi, M Edward ^a,m   Wu, Ming C ^{b,d,e,f,g,h,i,j,k}   Pister, Kristofer S J ^b,c,d,l  

^a ROCKWELL SCIENCE CENTER   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e LUCENT TECHNOLOGIES   (United States)

^f University of California   (United States)

^g IEEE

^h AMERICAN PHYSICAL SOCIETY   (United States)

ⁱ OPTICAL SOCIETY OF AMERICA   (United States)

^j URSI ^*

^k Eta Kappa Nu   (United States)

^l UNIVERSITY OF CALIFORNIA   (United States)

^m International Society for Optics and Photonics   (United States)

more..

Author keywords

Actuators; Digital micromirror devices (DMDs); Digital video; Fiber data distribution interface (FDDI); Integration; Micro optics; Micro opto electro mechanical systems; Microlens; Mirrors

Indexed keywords

EID: 0000072809     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601356     Document Type: Article

References (34)

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