Surface-micromachined diffraction gratings for scanning spectroscopic applications

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 343-345

  Kiang, Meng Hsiung ^a   Nee, Jocelyn T ^a   Lau, Kam Y ^a   Muller, Richard S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL DESIGN; SCANNING; SPECTROMETERS;

ELECTROSTATIC COMBDRIVES;

DIFFRACTION GRATINGS;

EID: 0030674578     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)