Surface-micromachined gear trains driven by an on-chip electrostatic microengine

IEEE Electron Device Letters

Volumn 17, Issue 7, 1996, Pages 366-368

  Sniegowski, J J ^a   Garcia, E J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEPOSITION; ELECTROSTATICS; FILMS; GEARS; MECHANICAL DRIVES; MICROMACHINING; OPTICAL SHUTTERS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; TORQUE;

BATCH FABRICATION; CONTINUOUSLY ROTATING OUTPUT GEAR; MULTIPLE GEARS; ON CHIP ELECTROSTATIC MICROENGINE; SURFACE MICROMACHINED GEAR TRAINS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030182732     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.506369     Document Type: Article

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