Platinum gettering in silicon by silicon phosphide precipitates

Journal of Applied Physics

Volumn 79, Issue 4, 1996, Pages 2145-2147

  Correia, A ^a   Pichaud, B ^a   Lhorte, A ^b   Quoirin, J B ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000023972     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361040     Document Type: Article

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