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Canadian Journal of Physics

Volumn 74, Issue , 1996, Pages

Gettering of Cu to hydrogen-induced cavities in Si

(6) Hall, K C a Goldberg, R D a Lowes, T D a Simpson, P J a Mitchell, I V a Weatherly, G C b

a UNIVERSITY OF WESTERN ONTARIO (Canada)

b MCMASTER UNIVERSITY (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347760963 PISSN: 00084204 EISSN: None Source Type: Journal
DOI: 10.1139/p96-868 Document Type: Article

Times cited : (3)

References (21)

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