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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 291-296

Metal gettering by boron-silicide precipitates in boron-implanted silicon

(6) Myers, S M a Petersen, G A a Headley, T J a Michael, J R a Aselage, T L a Seager, C H a

a SANDIA NATIONAL LABORATORIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BINDING ENERGY; BORON; CRYSTAL IMPURITIES; FREE ENERGY; GETTERS; ION IMPLANTATION; PRECIPITATION (CHEMICAL); SECONDARY ION MASS SPECTROMETRY; TRANSMISSION ELECTRON MICROSCOPY;

BORON SILICIDES; METAL GETTERING;

SEMICONDUCTING SILICON;

EID: 0031547949 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(96)00942-1 Document Type: Article

Times cited : (21)

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