Mechanism of iron gettering in MeV Si ion implanted epitaxial silicon

Journal of Applied Physics

Volumn 84, Issue 6, 1998, Pages 3078-3084

  Koveshnikov, Sergei V ^a   Rozgonyi, George A ^b  

^a SHIN ETSU CHEMICAL CO LTD   (Japan)

^b North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004905723     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368462     Document Type: Article

References (13)

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