Influence of curvature on impurity gettering by nanocavities in Si

Applied Physics Letters

Volumn 74, Issue 13, 1999, Pages 1857-1859

  Schiettekatte, François ^a   Wintgens, Carl ^a   Roorda, Sjoerd ^a  

^a UNIVERSITÉ DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; IMPURITIES; ION IMPLANTATION; MATHEMATICAL MODELS; THERMODYNAMICS;

CURVATURE THERMODYNAMICS; IMPURITY GETTERING;

SEMICONDUCTING SILICON;

EID: 0032620597     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123692     Document Type: Article

References (8)

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