Iron solubility in highly boron-doped silicon

Applied Physics Letters

Volumn 73, Issue 10, 1998, Pages 1424-1426

  McHugo, S A ^a   McDonald, R J ^a   Smith, A R ^a   Hurley, D L ^a   Weber, E R ^b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000094935     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121964     Document Type: Article

References (20)

1. W. K. Tice and T. Y. Tan, Mater. Res. Soc. Symp. Proc. 2, 367 (1981).
2. D. Gilles, E. R. Weber, and S. K. Hahn, Phys. Rev. Lett. 64, 196 (1990).
3. The National Technology Roadmap for Semiconductors (Semiconductor Industry Association, San Jose, CA, 1994), pp. 110-113.
4. E. R. Weber and D. Gilles, Semiconductor Silicon 1990: Electrochem. Soc. Meeting, 1990, p. 585.
5. H. Reiss, C. S. Fuller, and F. J. Morin, Bell Syst. Tech. J. 35, 535 (1956).
6. W. Shockley and J. T. Last, Phys. Rev. 107, 392 (1957).
7. R. R. Troutman, IEEE Electron Device Lett. EDL-4, 438 (1983).
8. R. N. Hall and J. H. Racette, J. Appl. Phys. 35, 379 (1964).
9. S. F. Cagnina, J. Electrochem. Soc. 116, 498 (1969).
10. T. A. O'Shaughnessy, H. D. Barber, D. A. Thompson, and E. L. Heasell, J. Electrochem. Soc. 121, 1350 (1974).
11. D. Gilles, W. Schröter, and W. Bergholz, Phys. Rev. B 41, 5770 (1990).
12. M. Sano, S. Sumita, T. Shigematsu, and N. Fujino, Semiconductor Silicon 1994: Electrochem. Soc. Meeting, 1994, pp. 784-795.
13. M. Aoki, A. Itakura, and N. Sasaki, Appl. Phys. Lett. 66, 2709 (1995).
14. M. Miyazaki, S. Miyazaki, S. Ogushi, T. Ochiai, M. Sano, and T. Shigematsu, Jpn. J. Appl. Phys., Part 2 36, L380 (1997).
15. E. R. Weber, Appl. Phys. A: Solids Surf. 30, 1 (1983).
16. A. R. Smith, R. J. McDonald, H. Manini, D. L. Hurley, E. B. Norman, and M. C. Vella, J. Electrochem. Soc. 143, 339 (1996).
17. H. Lemke, Phys. Status Solidi A 64, 215 (1981).
18. H. Lemke, Phys. Status Solidi A 76, 223 (1983).
19. L. C. Kimerling and J. L. Benton, Physica B & C 116, 297 (1983).
20. A. Chantre and D. Bois, Phys. Rev. B 31, 7979 (1985).